Associate Professor
Electrical and Computer
Engineering
E430R Nebraska HallLincoln, NE 68588
(402) 472-1697
efranke3@unl.edu
Education
- Dr.rer.nat. (Ph.D.), 1998 University of Leipzig, Germany
- Diploma, 1994 University of Leipzig Germany
Research Interests
- Nanofabrication
- Thin Film Deposition
- Ion beam processing
- Chiral materials and Hybrids
- Material characterization
Inventions/Patents
- Ion beam technology
- Thin film preparation and characterization
- Chiral hybrid materials
- Electronic materials
- In situ process monitoring
Selected Publications
- E. Schubert, "Sub-wavelength antireflection coatings from sculptured thin films", Contrib. Plasma Phys. 47, 545 (2007).
- E. Schubert, J, Fahlteich, B. Rauschenbach, M. Schubert, M. Lorenz, M. Grundmann, and G. Wagner, "Recrystallisation behaviour of sculptured thin films from silicon", J. Appl. Phys. 100 (2006).
- E. Schubert, F. Frost, N. Razek, D. Hirsch, A. Schindler, and B. Rauschenbach, "Surface cleaning of GaAs by low-energy hydrogen ion-bombardment", J. Appl. Phys. 97, 54 (2005).
- E. Schubert, F. Frost, Th. Höche, and B. Rauschenbach, "Nanostructure fabrication by glancing angle ion beam assisted deposition of silicon", App. Phys. A 81, 481 (2005).
- E. Schubert, F. Frost, B. Ziberi, G. Wagner, H. Neumann, B. Rauschenbach, "Ion beam sputter deposition of soft x-ray Mo/Si multilayer mirrors", J. Vac. Sci. Technol. B 23, 959-965 (2005).
- E. Franke, M. Schubert, J.A. Woollam, J.-D. Hecht, G. Wagner, H. Neumann, F. Bigl,"In situ ellipsometry growth characterization of dual ion beam deposited boron nitride thin films", J. Appl. Phys., 87, 2593 (2000).
- E. Franke, C.L. Trimble, J.S. Hale, M.Schubert, J.A. Woollam,"Solid state electrochromic reflectance device for emittance modulation in the infrared spectral region", Appl. Phys. Lett. 77, 930 (2000).
Books
- E. Schubert, F. Frost, H. Neumann, B. Rauschenbach, B. Fuhrmann, F. Heyroth, J. Rivory, E. Charron, B. Gallas and M. Schubert, "Ion beam assisted growth of sculptured thin films: Structural alignment and optical fingerprints", Adv. Solid State Phys. 46, 309, Springer Series (2007).