Charge Rates for NCMN Cleanroom Facility ($/hour) – 2023/2024
| Instrument |
Equipment NCMN Faculty |
Specialist NCMN Faculty |
Equipment University Faculty |
Specialist University Faculty |
Equipment Industry |
Specialist Industry |
| EBL (ZEISS SUPRA 40) |
65.00 |
62.00 |
76.00 |
70.00 |
118.00 |
109.00 |
| Laser Writer (DWL-66) |
42.00 |
62.00 |
52.00 |
70.00 |
80.00 |
109.00 |
| RIE (Trion Phantom III) |
35.00 |
62.00 |
40.00 |
70.00 |
60.00 |
109.00 |
| Deep RIE (Oxford PlasmaPro 100) |
50.00 |
62.00 |
60.00 |
70.00 |
89.00 |
109.00 |
| Mask Aligner (MJB-4) |
27.00 |
62.00 |
30.00 |
70.00 |
45.00 |
109.00 |
| Miscellaneous Tools (F40, DekTak XT) |
27.00 |
62.00 |
30.00 |
70.00 |
45.00 |
109.00 |
| AJA E-Beam Evap |
13.00 |
62.00 |
16.00 |
70.00 |
25.00 |
109.00 |
| Ion Beam Milling/Sputtering (Intlvac Nanoquest I) |
32.00 |
62.00 |
37.00 |
70.00 |
48.00 |
109.00 |
| Ion Beam Milling/Sputtering (Intlvac Nanoquest I) PUMP DOWN |
0.75 |
62.00 |
1.00 |
70.00 |
2.00 |
109.00 |
| Spin Coater |
5.00 |
62.00 |
6.00 |
70.00 |
8.00 |
109.00 |
| Access Fee/Cleanroom Equipment and Consumables (annual rate) |
200.00 |
|
200.00 |
|
300.00 |
|