Specimen Interaction Volume
The volume inside the specimen in which interactions occur while being struck with an electron beam. This volume depends on the following factors:
- Atomic number of the material being examined; higher atomic number materials absorb or stop more electrons and so have a smaller interaction volume
- Accelerating voltage being used; higher voltages penetrate farther into the sample and generate larger interaction volumes
- Angle of incidence for the electron beam; the greater the angle (further from normal) the smaller the volume
Below is an example of a typical Interaction volume for:
- Specimen is predominately Atomic number 28
- Accelerating Voltage is 20 kV
- 0 degrees tilt, incident beam is normal to specimen surface
noting the approximate maximum sampling depths for the various interactions. See Specimen Interactions for details on specific interactions listed.
