NCMN NanoFab Equipment - Dektak

Bruker Dektak-XT Stylus Surface Profiling System


The Dektak-XT stylus surface profiling system enables the critical nanometer-level film, step and surface measurements with repeatability of under five angstroms (<5Å). Utilizing a unique direct-drive scan stage, the system can speed up large 3-D surface profiling up to 40% scanning speeds. Featured Bruker’s vision64 operation and analysis software provides extensive user-defined capabilities for fast and comprehensive data collection and analysis. Dektak-XT system can greatly help future advances in the microelectronics, semiconductor, solar, high-brightness LED, medical science and materials science.

Equipment Specification:
  • Highest vertical resolution: 1Å
  • Max vertical range: 1mm
  • Max wafe size: 200mm (8 inch)
  • 3D surface profiling
Training Material: