About the Facility
NCMN Nanofabrication Cleanroom Central Facility provides state-of-the-art instrument for designing, fabricating, characterizing and testing of complex nano/micro-scale structures and devices. All these advanced tool sets are housed within the 4000 sq. ft. clean room at the Voelte-Keegan Nanoscience Research Center. The facility opens to all UNL researchers as well as external (including private sector) researchers for carrying out their research projects in physics, chemistry, nano/microelectronics, MEMs/NEMs, nano-bio, and other related and interdisciplinary areas. Staff support is available for training, process consultation, and collaboration on new process development. To learn more about the capability of our facility, please go to the research page.
Agencies including NSF and the University providing partial support of our Nebraska Nanoscale Facilities and NCMN Facilities require that the following words be included at the end of any Acknowledgement section of a paper in which experimental work was done in NNF-NCMN facilities:
The research was performed in part in the Nebraska Nanoscale Facility: National Nanotechnology Coordinated Infrastructure and the Nebraska Center for Materials and Nanoscience (and/or NERCF), which are supported by the National Science Foundation under Award ECCS: 2025298, and the Nebraska Research Initiative.
Focused Ion Beam
To access the NCMN Nanofabrication Cleanroom facility, all users must take cleanroom operating and safety training before they are allowed in the clean room. Users will also need to be trained and demonstrate proficiency on the tools they wish to use before they can operate themselves. Outside users may need to fulfill some additional requirements related to site security. Equipment time is generally scheduled through the online calendar on a first-come, first-served basis.
The NCMN Nanofabrication Cleanroom facility operates in a similar fee structure to other NCMN central facilities. Each tool has an hourly cost of use based on the full cost recovery for using that tool. This includes the cost of most supplies, maintenance, etc. There is also an additional hourly charge for staff involved activities such as training, tool operation, process development, etc. Currently there is no extra charge for cleanroom usage. For detailed rates, please go to the fee structure page.