Charge Rates for NCMN Cleanroom Facility ($/hour) – 2024/2025
| Instrument | Equipment NCMN Faculty | Specialist NCMN Faculty | Equipment University Faculty | Specialist University Faculty | Equipment Industry | Specialist Industry |
|---|
| EBL (ZEISS SUPRA 40) |
69.00 |
64.00 |
77.00 |
70.00 |
120.00 |
114.00 |
|---|
| Laser Writer (DWL-66) |
45.00 |
64.00 |
53.00 |
70.00 |
80.00 |
114.00 |
|---|
| RIE (Trion Phantom III) |
36.00 |
64.00 |
42.00 |
70.00 |
60.00 |
114.00 |
|---|
| Deep RIE (Oxford PlasmaPro 100) |
52.00 |
64.00 |
60.00 |
70.00 |
89.00 |
114.00 |
|---|
| Mask Aligner (MJB-4) |
28.00 |
64.00 |
31.00 |
70.00 |
45.00 |
114.00 |
|---|
| Miscellaneous Tools (F40, DekTak XT) |
27.00 |
64.00 |
30.00 |
70.00 |
45.00 |
114.00 |
|---|
| AJA E-Beam Evap |
13.00 |
64.00 |
17.00 |
70.00 |
25.00 |
114.00 |
|---|
| Ion Beam Milling/Sputtering (Intlvac Nanoquest I) |
32.00 |
64.00 |
37.00 |
70.00 |
48.00 |
114.00 |
|---|
| Ion Beam Milling/Sputtering (Intlvac Nanoquest I) PUMP DOWN |
0.75 |
64.00 |
1.00 |
70.00 |
2.00 |
114.00 |
|---|
| Spin Coater |
5.00 |
64.00 |
6.00 |
70.00 |
8.00 |
114.00 |
|---|
| Access Fee/Cleanroom Equipment and Consumables (annual rate) |
200.00 |
|
200.00 |
|
300.00 |
|
|---|