| Instrument | Equipment NCMN | Specialist NCMN | Equipment Academic | Specialist Academic | Equipment Industry | Specialist Industry |
|---|---|---|---|---|---|---|
EBL (Zeiss Supra 40) |
54.00 | 53.00 | 68.00 | 65.00 | 104.00 | 100.00 |
Laser Writer (DWL-66) |
36.50 | 53.00 | 44.00 | 65.00 | 67.50 | 100.00 |
Mask Aligner (MJB-4) |
23.50 | 53.00 | 28.00 | 65.00 | 43.00 | 100.00 |
FIB (FEI Strata 200) |
50.00 | 53.00 | 61.00 | 65.00 | 93.75 | 100.00 |
RIE (Trion Phantom III) |
28.00 | 53.00 | 35.00 | 65.00 | 55.00 | 100.00 |
Deep RIE |
45.00 | 53.00 | 55.00 | 65.00 | 84.50 | 100.00 |
Miscellaneous Tools (F-40, DekTak XT) |
23.50 | 53.00 | 28.00 | 65.00 | 43.00 | 100.00 |
AJA E-Beam |
9.75 | 53.00 | 13.00 | 65.00 | 17.00 | 100.00 |
Ion Beam Milling/Sputtering (Intlvac Nanoquest I) |
30.00 | 53.00 | 35.00 | 65.00 | 45.00 | 100.00 |
Ion Beam Milling/Sputtering (Intlvac Nanoquest I) PUMP DOWN |
0.75 | 53.00 | 1.00 | 65.00 | 2.00 | 100.00 |