Charge Rates for NCMN Cleanroom Facility ($/hour) – 2021/2022
| Instrument |
Equipment NCMN Faculty |
Specialist NCMN Faculty |
Equipment University Faculty |
Specialist University Faculty |
Equipment Industry |
Specialist Industry |
| FIB (FEI Strata 200) |
50.00 |
54.00 |
61.00 |
65.00 |
93.75 |
100.00 |
| EBL (ZEISS SUPRA 40) |
56.25 |
54.00 |
70.25 |
65.00 |
104.00 |
100.00 |
| Laser Writer (DWL-66) |
37.50 |
54.00 |
46.50 |
65.00 |
70.00 |
100.00 |
| RIE (Trion Phantom III) |
30.00 |
54.00 |
37.50 |
65.00 |
55.00 |
100.00 |
| Deep RIE (Oxford PlasmaPro 100) |
45.00 |
54.00 |
55.00 |
65.00 |
84.50 |
100.00 |
| Mask Aligner (MJB-4) |
23.50 |
54.00 |
28.00 |
65.00 |
43.00 |
100.00 |
| Miscellaneous Tools (F40, DekTak XT) |
23.50 |
54.00 |
28.00 |
65.00 |
43.00 |
100.00 |
| AJA E-Beam Evap |
11.00 |
54.00 |
14.00 |
65.00 |
20.00 |
100.00 |
| Ion Beam Milling/Sputtering (Intlvac Nanoquest I) |
30.00 |
54.00 |
35.00 |
65.00 |
45.00 |
100.00 |
| Ion Beam Milling/Sputtering (Intlvac Nanoquest I) PUMP DOWN |
0.75 |
54.00 |
1.00 |
65.00 |
2.00 |
100.00 |
| Spin Coater |
5.00 |
54.00 |
6.00 |
65.00 |
8.00 |
100.00 |
| Cleanroom Equipment and Consumables (annual rate) |
150 |
|
150 |
|
200.00 |
|