Fee Structure

Charge Rates for NCMN Nanofabrication Cleanroom Facility ($/hr) – 2020/2021
InstrumentEquipment
NCMN
Specialist
NCMN
Equipment
Academic
Specialist
Academic
Equipment
Industry
Specialist
Industry
EBL (Zeiss Supra 40)
54.00 53.00 68.00 65.00 104.00 100.00
Laser Writer (DWL-66)
36.50 53.00 44.00 65.00 67.50 100.00
Mask Aligner (MJB-4)
23.50 53.00 28.00 65.00 43.00 100.00
FIB (FEI Strata 200)
50.00 53.00 61.00 65.00 93.75 100.00
RIE (Trion Phantom III)
28.00 53.00 35.00 65.00 55.00 100.00
Deep RIE
45.00 53.00 55.00 65.00 84.50 100.00
Miscellaneous Tools (F-40, DekTak XT)
23.50 53.00 28.00 65.00 43.00 100.00
AJA E-Beam
9.75 53.00 13.00 65.00 17.00 100.00
Ion Beam Milling/Sputtering (Intlvac Nanoquest I)
30.00 53.00 35.00 65.00 45.00 100.00
Ion Beam Milling/Sputtering (Intlvac Nanoquest I) PUMP DOWN
0.75 53.00 1.00 65.00 2.00 100.00