Fee Structure

Charge Rates for NCMN Cleanroom Facility ($/hour) – 2021/2022
Instrument Equipment NCMN Faculty Specialist NCMN Faculty Equipment University Faculty Specialist University Faculty Equipment Industry Specialist Industry
FIB (FEI Strata 200) 50.00 54.00 61.00 65.00 93.75 100.00
EBL (ZEISS SUPRA 40) 56.25 54.00 70.25 65.00 104.00 100.00
Laser Writer (DWL-66) 37.50 54.00 46.50 65.00 70.00 100.00
RIE (Trion Phantom III) 30.00 54.00 37.50 65.00 55.00 100.00
Deep RIE (Oxford PlasmaPro 100) 45.00 54.00 55.00 65.00 84.50 100.00
Mask Aligner (MJB-4) 23.50 54.00 28.00 65.00 43.00 100.00
Miscellaneous Tools (F40, DekTak XT) 23.50 54.00 28.00 65.00 43.00 100.00
AJA E-Beam Evap 11.00 54.00 14.00 65.00 20.00 100.00
Ion Beam Milling/Sputtering (Intlvac Nanoquest I) 30.00 54.00 35.00 65.00 45.00 100.00
Ion Beam Milling/Sputtering (Intlvac Nanoquest I) PUMP DOWN 0.75 54.00 1.00 65.00 2.00 100.00
Spin Coater 5.00 54.00 6.00 65.00 8.00 100.00
Cleanroom Equipment and Consumables (annual rate) 150 150 200.00