Research Images

Electron Beam Lithography (EBL)

NanoChannel
1. NanoChannel
Single electron transistor
2. Single electron transistor
Josephson Junction array

3. Josephson Junction array

Optical Lithography

Electronic contact pads (Gold)
1. Electronic contact pads (Gold)
MTJ device pattern (Multilayers)
2. MTJ device pattern (Multilayers)
Hall sensor
3. Hall sensor

Focused Ion Beam (FIB)

AFM tip sharpening
1. AFM tip sharpening
Crossing section on stainless steel

2. Crossing section on stainless steel
Hole array on cantilevel
3. Hole array on cantilevel

Reactive Ion Etching (RIE)

Polystyrene beads etching

1. Polystyrene beads etching
Si3N4 etching
2. Si3N4 etching