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Nanofabrication Cleanroom Facility
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Nanofabrication Cleanroom Facility
Results/ Images
Research Images
Electron Beam Lithography (EBL)
1. NanoChannel
2. Single electron transistor
3. Josephson Junction array
Optical Lithography
1. Electronic contact pads (Gold)
2. MTJ device pattern (Multilayers)
3. Hall sensor
Focused Ion Beam (FIB)
1. AFM tip sharpening
2. Crossing section on stainless steel
3. Hole array on cantilevel
Reactive Ion Etching (RIE)
1. Polystyrene beads etching
2. Si3N4 etching