Central Facilties - NanoFabrication


About the Facility

NCMN Nanofabrication Central Facility provides state-of-the-art instrument for designing, fabricating, characterizing and testing of complex nano/micro-scale structures and devices.  All these advanced tool sets are housed within the 4000 sq. ft. clean room at the Voelte-Keegan Nanoscience Research Center. The facility opens to all UNL researchers as well as external (including private sector) researchers for carrying out their research projects in physics, chemistry, nano/microelectronics, MEMs/NEMs, nano-bio, and other related and interdisciplinary areas.  Staff support is available for training, process consultation, and collaboration on new process development. To learn more about the capability of our facility, please go to the research page.

Cleanroom

cleanroom
cleanroom
cleanroom

Major Instruments

Lithography
EBL
EBL
Focused Ion Beam
FIB
FIB
Etching
RIE
RIE
DRIE
DRIE
Deposition
EBE
EBE
Metrology
Film
Filmetrics
R-Stand
R-Stand

Access Policy

To access the NCMN Nanofabrication facility, all users must take cleanroom operating and safety training before they are allowed in the clean room. Users will also need to be trained and demonstrate proficiency on the tools they wish to use before they can operate themselves. Outside users may need to fulfill some additional requirements related to site security. Equipment time is generally scheduled through the online calendar on a first-come, first-served basis.

Fees

The NCMN Nanofabrication facility operates in a similar fee structure to other NCMN central facilities. Each tool has an hourly cost of use based on the full cost recovery for using that tool. This includes the cost of most supplies, maintenance, etc. There is also an additional hourly charge for staff involved activities such as training, tool operation, process development, etc. Currently there is no extra charge for cleanroom usage. For detailed rates, please go to the fee structure page.

Facility Contacts

Jiong Hua
Facility Specialist (primary)
102B NANO
Phone: 402-472-3773
jhua2@unl.edu
Jiong Hua
Jiong Hua
Shah Valloppilly
Facility Specialist (secondary)
006 & 008 Jorgensen Hall
Phone: 402-472-3693
svalloppilly2@unl.edu
Shah Valloppilly
Shah Valloppilly
Steve Michalski
Facility Specialist (tertiary)

N102A NANO
Phone: 402-472-7096
smichalski2@unl.edu
Steve Michalski
Steve Michalski
Sy-Hwang Liou
Faculty Advisor &
User Committee Chair

085 Jorgensen Hall
Phone: 402-472-2405
sliou@unl.edu
Sy-Hwang Liou
Jiong Hua