Central Facilities

NCMN Central Facility for Nanofabrication Cleanroom

NCMN Nanofabrication Central Facility provides state-of-the-art instrument for designing, fabricating, characterizing and testing of nano/micro-scale materials and devices. It is located in the clean room of the Voelte-Keegan Nanoscience Research Center, which opens to all UNL researchers as well as external (including private sector) researchers for carrying out their research projects in physics, chemistry, nano/microelectronics, MEMs/NEMs, nano-bio, and other related and interdisciplinary areas. Staff support is also available for training, process consultation, and collaboration on new process development. To learn more about the capability of our facility, please go to About Facility web page.

Major Instruments

Lithography

• Electron Beam Lithography (EBL)
• Laser Lithography system (Heidelberg DWL 66FS)
• Optic Lithography (SUSS MJB-4 Mask Aligner)

Focused Ion Beam

• Focused Ion Beam Workstation (FEI Strata 200)

Etching

• Reactive Ion Etching (Trion Minilock Phantom III)
• Wet Etching Bench

Metrology

• Stylus Profilometer (Dektak XT)
• Reflective Film Thickness Measurement System (Filmetrics F40)
• Optic Microscope with camera (Nikon Eclipse L200N)
• Four-probe Resistivity Measurement Stand (Lucas 302) 

Access Policy

To access the NCMN Nanofabrication facility, all users must take orientation, cleanroom protocol, and safety training before they are allowed in the clean room. Users will also need to be trained and demonstrate proficiency on the tools they wish to use before they can operate themselves. Outside users may need to fulfill some additional requirements related to site security. Equipment time is generally scheduled through Online Calendar on a first-come-first-served-basis.

Fees

The NCMN Nanofabrication facility operates in a similar fee structure to other NCMN central facilities. Each tool has an hourly cost of use based on the full cost recovery for using that tool. This includes the cost of most supplies, maintenance, etc. There is also an additional hourly charge for staff involved activities such as training, tool operation, process development, etc. Currently there is no extra charge for cleanroom usage. For detailed rate, please go to Fee Structure website.

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