Central Facilties - NanoFabrication

NCMN Central Facility for Nanofabrication

NCMN Nanofabrication Central Facility provides state-of-the-art instrument for designing, fabricating, characterizing and testing of complex nano/micro-scale structures and devices.  All these advanced tool sets are housed within the 4000 sq. ft. clean room at the Voelte-Keegan Nanoscience Research Center. The facility opens to all UNL researchers as well as external (including private sector) researchers for carrying out their research projects in physics, chemistry, nano/microelectronics, MEMs/NEMs, nano-bio, and other related and interdisciplinary areas.  Staff support is available for training, process consultation, and collaboration on new process development. To learn more about the capability of our facility, please go to Research web page.

Clean room


Major Instrument

  • Lithography
       EBL       DWL66     MJB4
  • Focused Ion Beam
  • Etching
       RIE        DRIE
  • Deposition
  • Metrology
    DeKtak  Filmetrics   R-Stand

Access Policy

To access the NCMN Nanofabrication facility, all users must take cleanroom operating and safety training before they are allowed in the clean room. Users will also need to be trained and demonstrate proficiency on the tools they wish to use before they can operate themselves. Outside users may need to fulfill some additional requirements related to site security. Equipment time is generally scheduled through Online Calendar on a first-come-first-served-basis.


The NCMN Nanofabrication facility operates in a similar fee structure to other NCMN central facilities. Each tool has an hourly cost of use based on the full cost recovery for using that tool. This includes the cost of most supplies, maintenance, etc. There is also an additional hourly charge for staff involved activities such as training, tool operation, process development, etc. Currently there is no extra charge for cleanroom usage. For detailed rate, please go to Fee Structure website.




Nebraska Center for Materials and Nanoscience

                   Dr. Jiong Hua, Nanofabrication Specialist
                      Dr. Jiong Hua, Facility Specialist                   


New NCMN Facilities Sign-In Calendar 

  Check with the Specialist for log-in access   

Jiong Hua, Facility Specialist

855 N. 16th Street,
102B Nanoscience Research Center
Lincoln, NE 68588-0298

phone: (402) 472-3773
fax: (402) 472-6148

Sy-Hwang Liou, Faculty Adviser & User committee Chair

Theodore Jorgensen Hall, Rm 085
Lincoln, NE 68588-0298

phone: (402) 472-2405